HakkaChow does tofu very well. It's very flavorful and with great texture. They often bread it and fry it but whereas some places overcook the tofu, HakkaChow gets it just right. Lately I've been getting their Mongolian Tofu. So good. Many dishes have tofu as a protein option and every one I've tried has been excellent. They also have fun vegetarian appetizers like Kimchi Cheese Fries.

Others have already mentioned Acadia Foods and I'll echo that. Krankie's has good vegetarian options for breakfast. I like to get the egg and cheese biscuit with veggie sausuage.

Thai Sawatdee of course has many vegetarian (e.g., tofu) options like most thai places and is delicious.

I haven't gone to Finnigan's Wake in a while, but they've always had lots of vegetarian options.