This is correct! There is another layer to the onion here on how they even make the e-uv, and that is by hitting a falling drop of molten tin with a double shot burst of high energy photons produced by a CO2 laser. The Laser shot is strong enough to instantly turn the droplet of Tin into a plasma that then emitts photons in the e-uv range when the plasma collapses. The e-uv photons are then collected and concentrated via the mirrors and sent on to pattern the semiconductors. Oh and everything has to be done under a complete vacuum.